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Rotary table
Bearing Type: Gas bearing
Rotation accuracy: (0.025+6H/10000)μm
Rotating speed: 6rpm
Adjust table diameter: 180mm
Table loading capacity: 15kg
Rotation diameter: 320mm
Max measure diameter: 250mm
Min measure inner diameter: 1mm probe (Optional)
Column (Z-axis )
Column transverse travel; 420mm
Max detection depth: 100mm (min inner diameter): 30mm)
Horizontal arm (X-axis)
Horizontal movement: 100mm
Protrusion amount: 25mm
Detector
Acquisition device: Circle grating
Circumference of sampling points: 4096 points
Sensor type: Inductive Sensor
Sensor range: ±300μm
Sensor resolution: 0.01μm
