PMS AirSentry IIモバイルAMC検出システム

Application
+ Troubleshooting and spatial identification of contamination sources
+ Isolation and verification of AMC events detected by multi-point monitoring systems
+ Testing of AMC levels within minienvironments and process tools
+ Testing and validation of chemical filtration performance

Cart size (l, w, h): 96.5 x 64.8 x 123.2 cm
Weight:  <154 kg="" br=""> Analytical wetted surfaces: Teflon, electropolished 316 stainless steel
CDA quality:  < - 60 °C dew point, chemically filtered
CDA capacity:  > 800 cc/min for > 30 minutes
Working time (fully-charged/pressurized): > 30 minutes
Bypass CDA inlet (low vibration mode): 1/4 Swagelok
Vacuum 25 kPA (absolute), 1,500 cc/min
Available analyzers (LOD - Limit of Detection 3 s)
+ AirSentry II Acids, 0 – 50 ppbv, LOD = 0.2 ppbv
+ AirSentry II Amines, 0 – 50 ppbv, LOD = 0.2 ppbv
+ AirSentry II Ammonia, 0 – 50 ppbv, LOD = 0.2 ppbv
+ AirSentry II Chlorides, 0 – 50 ppbv, LOD = 0.7 ppbv
Temperature range
+ Operating: 15 ~28 °C
+ Storage: - 40 ~+ 50 °C
Humidity range 
+ Operating: 30 ~ 50% RH
+ Storage: 0 ~90% RH
Communication and data transfer: Ethernet , USB
Software: Facility Net and AirSentry II Service Software
Operating system: Windows XP
Utility requirements: User-supplied power (single phase): 230 VAC, 50 HZ