PMS LiQuilaz II S03 液体用粒子計数分光メーター（0.3 - 3.0 µm）

Applications
- Effervescent chemical measurements using compression sampling
- Chemical quality assurance
- Process bath monitoring
- DI water monitoring
- Chemical delivery systems
- Photoresist monitoring

Specifications

- Size range 0.2 – 2.0 µm
- Channels User adjustable from 1 to 15
- Flow rate: 80 ± 10% ml/min
(20 ± 10% mL/min available for all S series models for sampler applications)
- Sample volume: Volumetric 80 ml/min (100%) 
- Maximum concentration: 10,000 particles/ml
- Sample temperature: 32 – 302 °F (0 – 150 °C)
- Zero count: < 15 counts/liter
- Pressure range: 0 - 100 psi
- Laser source: Laser diode
- Wetted surface materials: Sapphire, Teflon®, Kalrez® 4079 and Kel-F®
- Dimensions (l, w, h): 32.4 x 10.8 x 11 .4 cm
- Weight: 6.1 lb (2.8 kg)
- Electrical rating: 100 - 240 V, 50/60 Hz, 0.75 A
- Communication modes: 5-wire, RS-485, DE9 connectors, PMS serial communications protocol, 10/100BaseT Ethernet, PMS
 Ethernet Protocol, Modbus TCP
- Calibration: Materials used are traceable to U.S. National Institute of Standards and Technology (NIST) and/or
 Japanese Institute of Standards (JIS)
- Environment: Temperature: 50 – 95 °F (10 – 35 ºC); Humidity: non-condensing