VINE TFM-200 膜厚計 (350 – 1,050 ㎚/ 0.5 – 100 ㎛)

Thickness range: 1 ㎛ – 400 ㎛

Wavelength range: 750 ㎚ – 1,100 ㎚

Spot size: ​ 40 ㎛​, 80 ​㎛​ ( 8 ​㎛​ optional)

Repeatability:  <± 0.001 ㎛ at 1 ㎛ SiO2 on Si wafer

Light source: Tungsten halogen 35 W

Sample stage: 140 mm x 132 mm (X-Y movement 75 x 50 mm)

Dimensions 

Detector: 22 cm × 22 cm × 7 cm (H)

Microscope: 15 cm x 20 cm x 50 cm (H)

Weight​: 110 or 220 V / 0.5 A

Applications: 

- Semiconductor 

- Display

- Conductive oxides

- Protective coatings

- PCB coating process

- Parylene coatings

- Hard coatings

- Lens coatings

- Bio medical applications

- Adhesive coatings

- Polymer films (ex. PET)

- Thick photo-resists (ex.SU-8)