INFICON Spot CDS530D Capacitance Diaphragm Sensor
Full scale (FS): 10 Torr - 1000 Torr
Accuracy (Sensor 1 & 2): 0.5 % of reading
Temperature effect
on zero: 0.01 % FS / °C
on span: 0.01 % of reading / °C
Resolution: 0.01 % FS / °C
Long time stability: 0.5 % FS / year
Lowest reading: 0.05 % FS
Measuring range: 0.1 ... 100 % FS
Temperature
Ambient operating: 0 ... 60 °C
Compensated range: 10 ... 50 °C
Storage: -20 ... 80 °C
Ambient humiditiy limits: < 80 % RH non-condensing
Maximum admissible pressure: 400 kPa absolute
Burst pressure: 800 kPa absolute
Supply voltage: 5 ± 0.25 VDC
Supply voltage ripple: ≤ 50 mVpp
Power consumption: < 0.05 W operation
Digital interface: SPI bus
Data rate: 1, 2.5, 5, 10, 25, 100, 200, 250 ms (selectable during ordering process)
Responds time: 2 ms (10 ... 90%)
Electrical connection: JST or Flex. cable
Materials exposed to vacuum: ceramics (Al2O3), stainless steel (AISI 316L)
Tightness, leak rate: < 1 E-9 mbar l/s
Mounting position: any, recommended vertical up
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