MKS IE1000A Elastomer-sealed, Mass Flow Controllers (500-1000 slm; IP66)
Full Scale Flow Range: 501-1000 slm (N2 equivalent)
Fitting Type: Compatible with: 12 mm Swagelok; 0.5 in. tube compression; 0.75 in. compression; 0.5 in. NPT female; 0.75 in. NPT female; 8 VCR male; 8 VCO male
Connector: Profibus; PROFINET; 15 pin D (Analog 0-5 VDC I/O); 15 pin D (4-20 mA I/O)
Maximum Inlet Pressure: 150 psig
Normal Operating Pressure Differential: 40-50 psid
Burst Pressure: 1500 psig
Control Range: 2-100% of Full Scale
Typical Accuracy: ±1% of set point for >20% to 100% Full Scale
± 0.25% of Full Scale for 5% to 20% Full Scale
Repeatability: ±0.5% of Reading
Resolution: 0.1% of Reading
Zero Temperature Coefficient: <0.05% of Full Scale/°C
Span Temperature Coefficient: <0.08% of Reading/°C
Inlet Pressure Coefficient: <0.08% of Reading/psi
Typical Settling Time: <3 sec typical above 10% Full Scale @ 50 psi
Warm-up Time: 1 hour
Operating Temperature: 10-50°C
Storage Humidity: 0-95% Relative Humidity, non-condensing
Storage Temperature: -20° to 65°C
Enclosure Rating: IP66
Power Requirements: 15-24 VDC @ (<8 watts)
Flow Input Output Signal: Voltage: 0-5 VDC
Current: 4-20 mA
Analog I/O Connector: Voltage:15-pin Type "D" male
Current: 15-pin Type "D" male
Weight: 12.7 lbs. (5.8 kg)
Compliance: CE
For specific range please check the attachment below!
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