MKS IE250A-MFM Elastomer-sealed Mass Flow Meters (100-250 slm)
Full Scale Flow Range: 100-250 slm (N2 equivalent)
Measurement Range: 0.1-100% of Full Scale
Maximum Inlet Pressure: 150 psig
Burst Pressure: 1500 psig
Typical Accuracy; ±1% of Reading (with N2 calibration gas)
Repeatability: ±0.5% of Reading
Resolution: 0.1% of Full Scale
Zero Temperature Coefficient: <0.05% of Full Scale/°C
Span Temperature Coefficient: <0.08% of Reading/°C
Inlet Pressure Coefficient: <0.03% of Reading/psi or less
Warm-up Time: 1 hour (to within 0.2% of Full Scale of steady state performance)
Operating Temperature: 10-50°C
Storage Humidity: 0 to 95% relative humidity, non-condensing
Storage Temperature: -20 to 65°C (-4 to 149° F)
Enclosure Rating: IP66
Power Requirements: +15 to +24 VDC @ (<2 watts)
Flow Input Output Signal: Voltage (0-5 VDC)
Current (4-20 mA)
Weight: <3.4 lbs (1.54 kg)
Compliance: CE
For specific range please check the attachment below!
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