MKS IM100A Metal-Sealed, Digital Mass Flow Controller (50 - 100 slm; IP66)
Full Scale Flow Range: 50,000 to 100,000 sccm (N2 equivalent)
Maximum Inlet Pressure: 150 psig
Normal Operating Pressure Differential: 50,000 - 100,000 sccm; 40 to 80 psid (N2 Full Scale with atmospheric pressure at the MFC outlet)
Proof Pressure: 1000 psig
Burst Pressure: 1500 psig
Control Range: 2% to 100% of Full Scale
Typical Accuracy: ±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability: ±0.3% of Reading
Resolution: 0.1% of Full Scale
Zero Temperature Coefficient: <0.05% of Full Scale/°C
Span Temperature Coefficient: <0.08% of Rdg./°C
Inlet Pressure Coefficient: <0.02% of Rdg./psi
Typical Settling Time: <750 msec., typical above 10% Full Scale
Warm-up Time: 30 minutes
Operating Temperature: 10° to 50°C
Storage Humidity: 0 to 95% Relative Humidity, non-condensing
Storage Temperature: -20° to 80°C
Valve Seat Material: EPDM (Class VI), EPDM, Viton® (Class VI), Viton, Buna, or Neoprene
Wetted Materials: 316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
Surface Finish: 10µ inch average Ra (electropolished)
Enclosure Rating: IP66
Power Requirements: +15 to +24 VDC @ (<4 watts)
Flow Input Output Signal: Voltage: (0 to 5 VDC) 15 pin Type "D" male
Current: (4 to 20 mA) 15 pin Type "D" male
Weight: 3 lbs (1.4 kg)
Compliance: CE
For specific range please check the attachment below!
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