ZEISS Gemini SEM 360 电子显微镜

Resolution:

0.4 nm @ 30 kV (STEM)  

0.5 nm@ 15 kV 

0.7 nm @ 1 kV TD  

0.8 nm @ 1 kV 

1.0 nm @ 500 V

Probe Current: 3 pA - 20 nA (100 nA configuration also available)

Maximum field of view in high resolution mode: 1.6 mm at 1 kV and WD = 7 mm

Magnification: 1 – 2,000,000

5-axes motorized eucentric specimen stage:

X = 130 mm; Y = 130 mm

Z = 50 mm

T = -4º to 70º

R = 360º (continuous)

Specimen size: up to 179 mm in diameter for the full stage travel range of 130 mm.

Additional stage options available on request

Datasheet

Video