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Specifications
X axis measuring range: 140mm
X axis resolution: 0.2μm
X axis straightness: 0.8μm/100mm
X axis traverse speed: 0.1-10mm/s
Z axis measuring range: ±20mm
Z axis resolution: 0.05μm
Z axis traverse speed: 0.5-10mm/s
Linear accuracy: ±(1.5+|0.2H|)μm, H is measuring height in mm
Angular measuring accuracy: ±2'
Arc measuring accuracy: ±(2+R/8)μm, R is 2-10mm standard ball
Radius of probe tip: 25μm
Traverse direction: backword
Measuring force: 6.86-9.8mN
Measuring unit: mm/inch
Traceable angle: 72° (upward), 87° (downward)
Drive mode: motor
Travel of Z axis: 430mm
Dimension(LxWxH): 1200x700x1780mm
Power supply: 220±25%V, 50Hz
Weight: 320kg
Standard delivery
Main unit: 1 pc
Standard probe and arm: 1 pc of each
Standard block: 2 pcs
Standard ball: 2 pcs
Standard shaft: 1 pc
Stage: 1 pc
Vise: 1 pc
Measuring arm: 1 pc
Computer: 1 pc
Measurement software: 1 pc
Printer: 1 pc
Installation tools: 1 set
Optional accessory
Probe and measuring arm
