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Technical parameters
Supply voltage: 110 V / 230 V
Interface: USB
x, y, z axes
Max. traverse distance: (400 x 600 x 120) mm / α-Rotation ±180°
Min. positioning distance: (20 x 20 x 20) µm / α-Rotation 1°
Positioning speed: (20 x 25 x 10) mm/s / α-Rotation 90°/s
Weight: 75 kg
Sizes (L x W x H): (1030 x 775 x 900) mm
Scope of delivery
1x FLS 106 IC, 4-Axis Positioning System
1x CS-Scanner, ChipScan-Scanner Software / USB
1x GND 25, Ground Plane
1x DM-CAM, Digital Microscope Camera
1x Rotary unit, Rotary Unit
1x DM-CAM holder.3, Microscope Camera Holder
1x FLS 106 IC acc, Accessories for scanner
Short description
The FLS 106 IC scanner is a 4-axes positioning system that allows for the movement of ICR near-field probes along three linear axes and the rotation of the ICR near-field probes on one axis above an IC in its electronic assembly.
The ICR near-field probes allow for the measurement of high-frequency magnetic or E-fields up to 6 GHz with a high measuring resolution of 50 to 100 µm.
The IC scanner can be set up for surface scans and ESD or EFT immunity tests in a few simple steps.
Datasheet
Manual