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Measure range
X axis driver: 100mm
Z1(sensor) Roughness and contour sharing:15mm
Column height: 400mm
X Axis (L=X axis Moving guide distance) ±(0.8+0.2L/100)μm
Z1 Axis (H=Z1 axisd direction measure height): ±(0.8+|0.2H|/100)μm
Measure accuracy
salvage value contour: ≤0.005μm
Error value: ≤±(5nm+0.1A)
Indication repeatability: ≤±3%
X axis
straightness: 0.6μm /100mm
resolution: 0.01μm
sensor
type: Grating sensor
resolution: 0.01μm
Evaluate length; λc×3, 4, 5, 6, 7
Cutoff wavelength: 0.025, 0.08, 0.25, 0.8, 2.5, 8mm
Motion control
Speed of rail movement: 0.02mm–4.0mm/s
Measurement speed: 0.02mm– 4.0mm/s
