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Measuring range (X × Y × Z): 9.84"x 7.87"x 7.87" (250 × 200 × 200mm)
Resolution / scale unit: 0.1μm / reflective-type linear encoder
CCD camera: B & W
Illumination unit:
Vertical reflected stage light: White LED
Coaxial: White LED
Programmable Ring light: White LED
Measuring accuracy:
E1 X / Y axes: (2+3L / 1000) μm
E1 Z axis: (3+5L / 1000) μm
LAF repeatability: σ : 0.4μm
Stage glass size: 12.28" x 10.59" (312 x 269mm)
Maximum stage loading: 33lbs. (15kg)
Dimensions of main unit: 23.07" x 33.35" x 60.16" (586 x 847 x 1528mm)
Mass of main unit (including mounting stand): 595lbs. (270kg)
Optional accessories:
Laser Auto Focus
Rotary Index
