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Piezoelectric Output (SMC Male)
Voltage (Software Control): 75 V, 100 V, or 150 VDC
Current: 1 A Continuous (Max)
Stability: 100 ppm Over 24 Hours (After 30 min Warm-Up Time)
Noise: <3 mV RMS
Piezo Capacitance: 1 to 10 µF (Typical)
Bandwidth: 10 kHz (1 µF Load, 1 Vp-p)
External Input (BNC)
Input Type: Differential or Single Ended
Input Voltage for Full Range (i.e. 75 V, 100 V or 150 V): 10 V ±2%
Max Output
- 75 V Range: -10V to 90 V DC
- 100 V Range: -10V to 115 V DC
- 150 V Range: -10 V to 159 V DC
Position Feedback (PIEZO IN) (9-Pin D-Type Female)
Feedback Transducer Type(a): Strain Gauge or Capacitive Sensor
Detection Method: AC Bridge (18 kHz Excitation)
Typical Resolution: 5 nm (for 20 µm Actuator e.g., PAZ005)
Auto Configure: Identification Resistor or Stage ID EEPROM in Actuator
User Input/Output (AUX IO) (15-Pin D-Type Female)
4 Digital Inputs: TTL Levels
4 Digital Outputs: Open Collector
Trigger Input/Output: TTL
Trigger Input Functionality: Triggered Voltage Ramps/Waveforms
Trigger Output Functionality: Trigger Generation During Voltage Ramp Output
User 5 V (with Ground): 250 mA (Max)
(a) The controller measures a conditioned signal from the feedback sensor. For details of the circuitry, please contact Tech Support.
