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Resolution:
0.6 nm @ 30 kV (STEM)
0.7 nm @ 15 kV
1.0 nm @ 1 kV / 500 V TD
1.1 nm @ 1 kV / 500 V
1.5 nm @ 200 V
Probe Current: 3 pA - 40 nA ((100 nA or 300 nA configuration also available)
Maximum field of view in high resolution mode: 5 mm at 5 kV and WD = 8.5 mm
Magnification: 8 – 2,000,000
5-axes motorized eucentric specimen stage:
X = 130 mm; Y = 130 mm
Z = 50 mm
T = -4º to 70º
R = 360º (continuous)
Specimen size: up to 179 mm in diameter for the full stage travel range of 130 mm.
Additional stage options available on request
