White Light Interference Measuring Microscope INSIZE ISM-A8000 (1600×1100)

Measuring mode: PSI (physiognomic scanning)/VSI (vertical scanning)/bright field

Light source: white light, green light

Resolution of camera: 1600×1100

View field (20X interference objective): 414x414µm

Travel of Z-axis: 20mm motorized+50mm manual

Scanning range of Z-axis: 10mm

Resolution of Z-axis: 0.1nm

XY stage

size: 200×200mm

range: 50×50mm

max. weight of workpiece: 3kg

resolution: 0.2µm

control method: motorized

Range of horizontal adjustment: ±12° manual

Reflectance of measuring samples: 0.1%-100%

Repeatability of roughness measurement: 0.1nm

Accuracy of height measurement: <0.75% (VSI mode)

Measurement time: <5s (PSI mode)

Environmental requirement: temperature: 23±3°C, relative humidity: 25-65%, equipment installation should be kept away from vibration sources

Power supply: 220V, 50/60Hz

Dimension (L×W×H): 750×750×1330mm

Net weight: 100kg

Datasheet