Brooks Instrument SLA5853 Gas Mass Flow Controllers (100 - 2500 slpm, EtherCAT, 3/4” VCR)

Digital Communications I/O: EtherCAT

Mechanical Connection: 3/4” VCR

Valve Type: Normally closed (Size 3, Pressure diff. >30 psig (2 bar))

Analog Communications I/O: None

Revision Level:  RevB

Performance: 

Full Scale Flow Range (N2, Eq. 0ºC Ref): 100 - 1100 slpm/ 1100-2500slpm

Flow Accuracy—17025 Certified Devices: ±0.6% of S.P. (20 - 100% F.S.), ±0.12% F.S. (<20% F.S.)/ ±0.6% F.S

Flow Accuracy: ±0.9% of S.P. (20 - 100% F.S.), ±0.18% of F.S. (<20% F.S.)/ ±1.0% F.S

Control Range N2, eq.: 100:1 for F.S. from 1 - 50 slpm (50:1 for all other F.S. flows)

Repeatability & Reproducibility: 0.20% S.P

Linearity: Included in accuracy

Response Time (Settling Time within ±2% F.S. for 0 - 100% command step): <3 second

Zero Stability: <+0.2% F.S. per year

Temperature Coefficient Zero: <0.05% of F.S. per °C Span: <0.1% of S.P. per °C

Pressure Coefficient: ±0.03% per psi (0 - 200 psi N2)

Attitude Sensitivity: <0.2% F.S. maximum deviation from specified accuracy after re-zeroing

Ratings:

Operating Temperature Range: (-14) - 65°C (7 - 149°F)

Minimum Pressure Differential (Controllers): 7.5 psi / 0.52 bar at 500 lpm

Maximum Pressure Differential (Controllers):  290 psi / 20.0 bar

Leak Integrity (External) 1x10⁻⁹ atm. cc/sec He

Valve Shut Down (Leak-by)7 <1% of F.S. standard; improved shutoff available with Biotech package

For more details, see datasheet.

Datasheet

User Manual