Brooks Instrument VDM3-2 DI純水蒸気供給モジュール (1/4” tube compression, 3000sccm)

Series Inlet Fitting: 1/4” Tube Compression

Performance

Full Scale Ranges (H2O): 3000sccm

Turndown Ratio: 20:1

Step Response Time: ≤ 2 seconds (±2% of setpoint)

Accuracy: ±1.0% of setpoint (> 10% full scale); ±0.2% of full scale (5-10% full scale setpoint)

Linearity: ±0.5% of full scale

Repeatability: ±0.2% of full scale

Temperature Coefficient: 0.05% F.S. per °C (zero and span)

Valve Shutdown: <0.5% F.S. (water vapor)

Electrical

Communication: Analog or EtherCAT

Connections: 15-pin D-Sub and dual RJ-45

Input Signals:

Flow setpoint (0 to 5 Vdc)

Start up/drain

Output Signals:

Flow output (0 to 5 Vdc)

Ready to use

Power:

DC: ±15 Vdc ±5% @ 1.2 amp

AC: 208 - 230 Vac, 50/60 Hz, 290 watts nominal

Diagnostic Port: Micro USB

For more details, see datasheet.

Datasheet

User Manual