INFICON Cube CDGsci 静電容量ダイヤフラムゲージ

Response time: 100 ms

Lowest reading: 0.01 % FS

Lowest suggested reading: 0.05 % FS

Temperature

Operation (ambient): +10 … +40 °C

Storage: –10 … +50 °C

Supply voltage: +14 ... +30 V (dc) or ±15 V (±5%)

Power consumption

During Heat up: ≤15 W (1000 ... 100 Torrr & 10 ... 1 Torr); ≤12 W (0.1 Torr)

At operating temperature: ≤10 W (1000 ... 100 Torrr & 10 ... 1 Torr); ≤8 W (0.1 Torr)

Output signal (analog): 0 ... +10 V (dc)

Degree of protection: IP 40

Standards

CE conformity: EN 61000-6-2, EN 61000-6-3, EN 61010-1 and RoHS

ETL certification: UL 61010-1, CSA 22.2 No. 61010-1

SEMI compliance: SEMI S2

Electrical connection D-sub, 15-pin, male; 2 × LEMO Coax; Ethernet FCC

Setpoint

Number of setpoints: 2 (SP1, SP2)

Relay contact: ≤30 V (dc) / ≤0.5 A (dc)

Hysteresis: 1 % FS

Diagnostic port

Protocol: Web pages, REST services, RS232-ASCII

Materials exposed to vacuum: ceramics (Al2O3), stainless steel (AISI 316L)

Internal volume: ≤4.6 cm3

Weight: 1760 … 1803 g

Brochure

Manual

Datasheet