MKS 422 冷陰極真空・圧力センサ (2.75 in. CF; LEMO)

Sensor Type: Cold Cathode

Measurement Range: 1.0 x 10^-11 to 1.0 x 10^-2 Torr

                                   1.3 x 10^-11 to 1.3 x 10^-2 mbar

                                   1.3 x 10^-9 to 1.3 Pascal

Set Point Range: 2.0 x 10^-10 to 9.5 x 10-3 Torr

                            2.7 x 10^-10 to 1.2 x 10-2 mbar

                            2.7 x 10^-8 to 1.2 Pascal

Resolution: 1% of indicated decade, except 10% below 10-10 Torr and above 10-3 Torr

Reproducibility: 5% of indicated pressure

Connector: LEMO

Operating Temperature: 0-250°C (32-482°F)

Bake Out Temperature: 0-250°C (32-482°F)

Set Point Response: 120 ms (<10ms with CL card)

Exposed Materials: Stainless steel, silver-copper brazing alloy, alumina ceramics, aluminum AL 6061, Elgiloy®, OFHC® copper

Internal Volume: 1.8 in3 (30 cm3) max

Weight: 2.9 lbs. (1.3 Kg) with CF Flange

Literature