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INFICON LDS3000 AQ 蓄積リーク検出器

Minimum detectable leak rate of forming gas or helium: 1 x 10-5 mbar l/s

Measurement range: 5 decades

Test chamber pressure: Atmosphere (standard pressure)

Response time: < 1 s

Detection system: 180° sector field mass spectrometer

Start time: < 3 min

Field buses available: PROFIBUS, PROFINET, DeviceNet, EtherNet/IP

Connections: ISO-KF DN16

Ion source: 2 yttrium/iridium long-life cathodes

Digital inputs/outputs:  10 inputs, 8 outputs (when used with I/O1000 module)

Control input: PLC compatible (max. 35 V)

Recorder output lin/log: 0 – 10 V

Serial interface: RS232, RS485 or fieldbus systems

Dimensions (L x W x H): 330 x 240 x 280 mm

Details

Brochure


Manual


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