MKS 901P MicroPirani™ & Piezo Loadlock 真空圧力変換器 (NW16 ISO-KF; RS232/analog)

Absolute Measurement Range: 1.0 x 10-5 to 1500 Torr

Differential Measurement Range: -760 to +760 Torr

Digital Communication: RS232

Type: Vacuum Transducer

Sensor: MicroPirani™ (MEMS Thermal Conductivity)and Piezo differential (MEMS diaphragm)

Display: No

Seal Material: Viton

Electrical Connector: 15-pin, High Density, D-sub male

Interface: RS232/analog

Relays: 3

Fitting Type: NW16 ISO-KF

Installation Orientation: Any

Set Point Range: Absolute: 5.0 x 10-4 Torr to 1000 Torr. Differential: -760 to 100 Torr

Calibration Gas: Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon

Operating Temperature: 0 - 40°C (32 - 104°F)

Maximum Bakeout Temperature: 85°C (185°F)

Analog Output: 1-9 VDC (1 VDC per Decade)

Analog Output Resolution: 16 bit

Optional Analog Output 2: 5 VDC = 0 Torr, 1 VDC/decade (Piezo Differential)

Relay Contact Rating: 1 A @ 30VAC/DC, resistive

Relay Response: 100 msec maximum

Power Requirements: 9 - 30 VDC, <1.2 Watts maximum

Exposed Materials: Silicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton

Electronic Casing and Flange: 304 stainless steel

Compliance: CE

Analog Output 2 Resolution: 12 bit

Digital Baud Rates: 4800 - 230400 Baud