MKS AX8585 SEMOZON® 先進プロセス用独立型オゾン供給システム (200 slm)

Ozone Output: 375g/Nm3

Flow Rate: 22.7 lpm (6.0 gpm) per generator

Feed Gas: Oxygen, Nitrogen (100 - 1000 ppm of total flow)

Feed Gas Supply Pressure: O2 pressure 55 ±2 psig (379 ±13.5 kPa, 3.8 ±0.14 kg/cm2)

                                              N2 pressure 60 ±2 psig (413 ±13.5 kPa, 4.12 ±0.14 kg/cm2)

Feed Gas Purity: Oxygen: Grade 6 or better O2

                            Nitrogen: Grade 5 or better N2

Operating Temperature: 5 - 40°C (41 - 104°F)

Cooling Water Temperature Required: 5 - 25°C (41 - 77°F)

Cooling Water Filtration Required: 100 microns

Cooling Water Quality Required: 3 - 0.5 MΩcm DI

Voltage Requirements: 208 volts AC (±10%), three phase

Frequency: 50/60 Hz

Exhaust Flow Rate: 70.8 l/s (150 cfm) per generator

Control Air Pressure: 70 - 100 psig (483 - 689 kPa)

Dimensions: 28.4 x 81.7 x 41.4 in. (722 x 2074 x 1051 mm) (width x height x depth)

Relative Humidity: 30 - 90% (non - condensing)

Weight: 345 kg (760 lb) for system with one generator

Compliance: CE, UL/CSA, SEMI S2, SEMI F47

Altitude: Up to 1000 m (3280 ft) above mean sea level