MKS GE250A エラストマーシール、デジタルマスフローコントローラー (100-250 slm)

Full Scale Range (N2 equivalent): 100 to 250 slm

Maximum Inlet Pressure MFC/MFM: 150 psig (can not exceed pressure differential requirement across MFC)

Burst Pressure: 1500 psig

Control Range: 2% to 100% of Full Scale (range on mech.)

Typical Accuracy: ±1% of set point for > 20% to 100% Full Scale

                             ±0.25% of Full Scale for 5% to 20% Full Scale

Repeatability ±0.5% of Reading

Resolution: 0.1% of Full Scale

Temperature Coefficients:

- Zero: <0.05% of Full Scale/°C

- Span: <0.08% of Reading/°C

Inlet Pressure Coefficient:  <0.03% of Reading/psi or less

Typical Controller Settling Time: 1 to 2 seconds typical above 10% Full Scale @ 50 psi

Warm-up Time: 1 hour

Operating Temperature Range (Ambient): 10°C to 50°C

Storage Humidity: 0 to 95% relative humidity, non-condensing

Storage Temperature: -20° to 65°C (-4° to 149° F)

Wetted Materials: 316L S.S. 17-7 S.S., Elgiloy®, 430FR

Seal Options: Viton®, Buna, Neoprene®, EPDM, Viton (USP Class VI Compliant)

Surface Finish MFC/MFM: 16μ inch average Ra

Weight: <4.5 lbs (2.05 kg)

Electrical Analog I/O:

- Input Power Required: +15 to +24 VDC @ (<4 watts)

- Flow Input/Output Signal: Voltage (0 to 5 VDC): 15 pin Type ‘’D’’ male

                                            Current (4 to 20 mA): 15 pin Type ‘’D’’ male

- Compliance: CE

For specific range please check the attachment below!