Lonroy MMD-SV100 표면 거칠기 분석기 (100mm)

Measure range

X axis driver: 100mm

Z1(sensor) Roughness and contour sharing:15mm

Column height: 400mm

X Axis (L=X axis Moving guide distance) ±(0.8+0.2L/100)μm

Z1 Axis (H=Z1 axisd direction measure height): ±(0.8+|0.2H|/100)μm

Measure accuracy

salvage value contour: ≤0.005μm

Error value: ≤±(5nm+0.1A)

Indication repeatability: ≤±3%

X axis

straightness: 0.6μm /100mm

resolution: 0.01μm

sensor 

type: Grating sensor

resolution: 0.01μm

Evaluate length; λc×3, 4, 5, 6, 7

Cutoff wavelength: 0.025, 0.08, 0.25, 0.8, 2.5, 8mm

Motion control

Speed of rail movement: 0.02mm–4.0mm/s

Measurement speed: 0.02mm– 4.0mm/s