Brooks Instrument SLA5850 气体质量流量控制器 (0.003 ~ 50 slpm, EtherCAT, 6mm with Filter)

- Digital Communications I/O: EtherCAT

- Mechanical Connection : 6mm tube compression with Filter

- Valve Type: Normally closed

- Analog Communications I/O: None

- Revision Level:  RevB

- Performance: 

Full Scale Flow Range (N2, Eq. 0ºC Ref): 0.003 - 50 slpm

Flow Accuracy—17025 Certified Devices: ±0.6% of S.P. (20 - 100% F.S.), ±0.12% F.S. (<20% F.S.)

Flow Accuracy: ±0.9% of S.P. (20 - 100% F.S.), ±0.18% of F.S. (<20% F.S.)

Control Range N2, eq.: 100:1 for F.S. from 1 - 50 slpm (50:1 for all other F.S. flows)

Repeatability & Reproducibility: 0.20% S.P

Linearity: Included in accuracy

Response Time (Settling Time within ±2% F.S. for 0 - 100% command step): <1 second

Zero Stability: <+0.2% F.S. per year

Temperature Coefficient Zero: <0.05% of F.S. per °C Span: <0.1% of S.P. per °C

Pressure Coefficient: ±0.03% per psi (0 - 200 psi N2)

Attitude Sensitivity: <0.2% F.S. maximum deviation from specified accuracy after re-zeroing

- Ratings:

Operating Temperature Range: (-14) - 65°C (7 - 149°F)

Minimum Pressure Differential (Controllers): 5 psi / 0.35 bar

Maximum Pressure Differential (Controllers): Application specific up to 4500 psi / 300 bar (limits conditions)

Leak Integrity (External) 1x10^-9 atm. cc/sec He

Valve Shut Down (Leak-by)7 <1% of F.S. standard; improved shutoff available with Biotech package

For more details, see datasheet.

Datasheet

User Manual