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Microfocus tube with tungsten anode; molybdenum anode optionally available
Flexible, 4-fold exchangeable primary filter
Polycapillary optics for particularly small measuring spots (10 – 60 µm FWHM) with short measuring times
Silicon drift detector
Video system with 3× optical zoom for precise sample positioning
Precise, programmable measuring stage for automated measurements
Applications
Au/Pd/Ni/CuFe and Sn/Ni coatings in the micro- and nanometer range
Assembled and unassembled circuit boards
Testing of base metallization layers (under-bump metallization, UBM) in the nanometer range
Measurement of light elements, e.g. determination of the phosphorus content (in ENEIG/ENEPIG) under Au and Pd
Lead-free solder caps on copper pillars
Testing the elemental composition of C4 and smaller solder bumps, as well as small contact surfaces in the semiconductor industry
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