Brooks Instrument 4860 質量流量計 (50 sccm~ 40 slpm)

Performance:

Full Scale Flow Range: 50 ml/min - 40 l/min (50 sccm - 40 slpm) (N2 eq., at 0°C Ref, with typical 50 psid pressure differential)

Control Range: 2 - 100%

Flow Accuracy: ±3.0% of F.S., ±1.0% F.S. optional

Flow Repeatability: ±0.15% of F.S.

Response Time:

    Flow Signal: <0.3 sec

    Flow Control: Settling time <0.75 sec from 0 to 100% F.S. (typical <0.5 sec for all steps)

Temperature Coefficient: ±0.1% of F.S./°C (N2)

- Ratings:

Gases: Air, N2, O2, Ar, He, H2, CO2, CO, N2O, CH4, C3H6 (Propene), C3H8 (other gases upon request)

Operating Limits

Pressure 0 - 10 barg (0 - 150 psig)

Temperature 0 - 50°C

Humidity 5 to 95% R.H. (ambient)

Differential Pressure Range(Controllers): 2000 Torr

Leak Integrity: 45 psid max

Mechanical

Materials of Construction: Wetted parts: stainless steel, fluoroelastomers, silicon-based sensor

RoHS: Fully RoHS compliant per EU Directive 2011/65/EU

Outline Dimensions: Refer to Figures 6 and 7

Process Connections: Inlet/Outlet threads: 9/16” - 18 UNF threads, Refer to Figure 6 for available process connections

Electrical

Electrical Connections:

15-pin D-sub connector

Analog/RS232: 15-pin D-sub connector

Power Supply Voltage:

+15 Vdc + 10% or +24 Vdc + 10%

Device only uses single sided power supply

Inrush current: <1A

Power Requirments:

15 Vdc: Typical = 30 mA, Max = 60 mA

24 Vdc: Typical = 30 mA, Max = 60 mA

Analog Input / Output: 0-5 Vdc or 4-20 mA

Digital Input / Output: RS232 (Standard with all analog I/O options)

Valve Override Signal: Valve Controller: Input Open

Valve Closed: <0.3 V; open valve: >4.8 V

Local Operator Interface (LOI)

Display Effective display area: 28mm wide, 11mm high

Display Contents: 8x2 dot matrix display

Operating Limits Temperature: 0 - 50°C

Operating Humidity: 5 to 95% R.H. (ambient)

Electrical Connections: 2 15-pin D-sub connectors, one for the connection to the 4800 Series and one for the remote connection

Power Supply Voltage: The LOI optionally includes a wall mount power adaptor with a 3.5-mm DC-plug. The adaptor works with input voltages of AC 90-240 V/47-63Hz. The adaptor supports European, U.K., Australia and U.S. wall plugs. Power can also be supplied by a remote connection via the D-connector.

Materials of Construction: Enclosure: ABS plastic with CU-Ni plating

RoHS: Fully RoHS compliant per EU Directive 2011/65/EU

Datasheet

User manual