Brooks Instrument 5700 質量流量コントローラー＆メーター (0~50l/min, 5%)

Standard Flow Ranges*:

0-10, 0-20, 0-50, 0-100, 0-200, 0-500 ml/min

0-1, 0-2, 0-5, 0-10, 0-20, 0-50 liters/min

Rangeability: 20:1

Repeatability: 0.5% full scale

Accuracy: 5% full scale including linearity

Temperature Sensitivity: 

Zero: less than ±0.075% full scale per degree C

Span: less than ±0.075% full scale per degree C

Pressure Sensitivity: Less than 0.05% per psi (0.0073% per KPa)

Mounting Attitude Sensitivity: Less than 0.5% full scale shift after rezeroing

Working Pressure: Up to 150 psig (1034 KPa)

Temperature Limits: 

Operating: 5 to 65°C

Non-operating: -25 to 100°C

Materials of Construction: 304 and 316 Stainless Steel

Connections: 

Mechanical: 1/4” FNPT

Electrical: 5-Pin post header horizontal mount AMP 171826-5. The mating connector is AMP 172053-5

Power: 11.5 to 15.5 Vdc, 50 mA

Output Signal: 0-5 Vdc into 1000 ohms or greater

Dimensions: See Dimensions figure

Weight: 1lb/0.5Kg

Datasheet

User manual