Brooks Instrument 5851E 質量流量コントローラー (10 ~100 lpm, 1500 psi / 103 bar)

Flow Ranges and Pressure Ratings:

Flow Ranges N2 Eq. Ratings: 

Min. F.S.: 10

Max. F.S: 100 lpm

Pressure Unit psi/bar: 1500 psi / 100 bar

PED Module H Catogory: SEP

Performance

Flow Accuracy: 1% full scale

Control Range: 50:1

Repeatability & Reproducibility: 0.25% of rate

Linearity: Included in accuracy

Response Time (Settling Time within ± 2% F.S. for 0 - 100% command step): < 3 seconds

Zero Stability: < ± 0.2% full scale per year

Temperature Coefficient

Zero: < 0.075% of full scale per °C.

Span: < 1.0% of full scale shift from original calibration over 10 - 50 °C (50 - 122 °F) range

Pressure Coefficient: ± 0.3% per psi (0 - 200 psi N2)

Attitude Sensitivity: < 0.5% full scale maximum deviation from specified accuracy after re-zeroing

Ratings

Operating Temperature Range 5 - 65 °C (41 - 149 °F)

Minimum Pressure Differential (Controllers): 10 psi / 0.69 bar

Maximum Pressure Differential(Conrollers): 50 psi / 3.45 bar

Leak Integrity (External): 1 x 10-9 atm. cc/sec He

Mechanical

Valve Type: Normally Closed, Normally Open, Meter

Primary Wetted Materials: 316L Stainless Steel, High Alloy Stainless Steel, Viton® fluoroelastomers, Buna-N, Kalrez® and Teflon®

Electrical

Electrical Connection: 15-Pin Male Sub D-Type (DA-15P) or Card Edge connector (Controller models only)

Input (Setpoint) Signal: 0 to 5 Vdc (200 K ohms input resistance)

Output Signal: 0 to 5 Vdc into 2000 ohms (or greater) load

Reference Output Signal: 5 Vdc ±0.01 Vdc, max. load 2 K ohm

 Power Requirements: 10.5 watts,+15 Vdc @ 350 mA, -15 Vdc @ 350 mA

Datasheet

User manual