EBP SR-400T 高度な粗さ試験機 (0.001µm)

Measuring range:

- The Z axis (vertical): 320µm(-160µm~160µm), 12600µin(-6300µin~+6300µin)

- The X axis (Transverse): 17.5mm (0.69inch)

Resolution:

- The Z axis (vertical): 0.002µm/±20µm, 0.004µm/±40µm

                                    0.008µm/±80µm, 0.02µm/±160µm

Standard: ISO4287, ANSI b46.1, DIN4768, JISb601

Filter: RC, PC-RC, Gauss, D-P

Cut off length (lr): 0.25, 0.8, 2.5mm

Accurate to: 0.001µm

Tolerance: ±(5nm+0.1A); A=Ra standard value of precise specimen

Repeatability: ≤3%

Residual profile: ≤0.010µm

Power supply: Built-in Lithium ion battery 3600mAh

Main unit dimension: 155×145×58mm

Drive unit dimension: 23×27×115mm

Zoom of height adapter: 40mm

Weight: Around 1000g

Working environment: Temperature:-20℃~40℃; Humidity: <90%RH

Store and Transportation: Temperature:-20℃~40℃; Humidity: <90%RH

Standard Accessories

Main unit x 1

Groove sensor (non warranty parts) x 1

40mm Height adapter x 1

Calibration specimen x 1

Specimen holder x 1

Extension cable x 1

Touch pen x 1

Power Charger & USB Cable x 1

Instrument case x 1

Datasheet