Fcon C2020-4S2-50-CO2 デジタルマスフローコントローラー (50SCCM)

Flow range: 10SLM/ 20SLM

Gases: CO2

Valve type: NC: Normally Close

Flow rate control range: 2-100％ F.S

Accuracy: ±1％ F.S [※±1％ F.S Compatible]

Setting signal: Digital: RS485, Analog: 0-5V and 4.3-20mA can be switched

Output signal: Main unit display: 7 segment LED, Digital: RS485, Analog: 0-5V and 4-20mA can be switched

Repeatability: ±0.2％ F.S

Response: ≦2sec

Operating differential pressure: 100-300kPa (10SLM); 200-300kPa (20SLM)

Pressure resistance: 1MPa(G)

Operating temperature: 5-50℃, ≦85％RH (Scope of accuracy guarantee : 15-35℃)

Leak integrity: 1×10-7Pa･m3/sec He

Drive power source: +24VDC： ≧500mA

Communication: RS485, Analog 0-5VDC and 4-20mA can be switched

Wetted surface material: SUS316, PTFE, Fluoro-Rubber

Seal material: Fluoro-Rubber

Actuator system: Solenoid

Standard fitting: 1/4in.SWL

Accessory: User's manual, Written guarantee

Datasheet