Fcon CUBEMFC-1050-4S2-10-AR コンパクトフローコントロールユニット (10SCCM)

Flow range: 50SLM

Gases: Ar

Valve type: NO: Normally open

Flow rate control range: 5～100％ F.S. (Excluding Mass Flow Meter)

Accuracy: ±2％ F.S [※±1％ F.S Compatible] (Accuracy guaranteed between 15-35℃) 

Setting signal: 0.25～5VDC

Output signal: 0～5VDC

Repeatability: ±0.2％ F.S

Response: Depends on MFC selected.

Operating differential pressure: Depends on MFC selected.

Pressure resistance: 1MPa(G)

Operating temperature: 5-50℃ (Accuracy guaranteed (between 15～35℃), ≦85％RH (No condensation permitted)

Leak integrity: 1×10-7Pa･m3/sec He

Drive power source: 100-240VAC: ≦500mA

Communication: Analog: 0～5VDC

Wetted surface material: SUS316L, PTFE, Fluoro-Rubber

Seal material: Fluoro-Rubber

Actuator system: Thermal

Surface treatment: Machined finish

Standard fitting: 1/4in.SWL (equivalent)

Accessory: Power cord, User's manual, Written guarantee

Datasheet