INFICON Porter CDG020D 静電容量式ダイヤフラム圧力計

Full scale (FS) 10 ... 2000 Torr / mbar

Accuracy: 

3CA3-xxx-xxx: 1 % of reading

3CA4-xxx-xxx: 0.5 % of reading

Temperature effect

On zero: 0.02 % FS / °C

On span: 0.02 % of reading / °C

Resolution: 0.05 % FS

Long time stability: 0.5 % FS / year

Lowest reading: 0.05 % FS

Temperature compensated range: +10 ... +50 °C

Admissible temperature

Operation (ambient): 0 ... +70 °C

Bakeout at flange: ≤110 °C

Storage: –20 ... +85 °C

Ambient humidity limits: <80% RH, non-condensing

Supply voltage

At the gauge: +13 ... +30 V (dc)

Power consumption: ≤0.3 W

Output signal (analog): 0 ... +10 V (dc)

Max. output voltage: +10.24 V (dc)

Response time: 100 ms

Degree of protection: IP 40

Electrical connection

3CAx-xxx-0000: FCC, 8-pin

3CAx-xxx-0100: D-Sub, 9-pin, male

3CAx-xxx-0A00: Binder M12, 8-pin, male

Materials exposed to vacuum: ceramics (AI2O3), stainless steel (AISI 316L)

Tightness: <1x10-9 mbar l/s

Mounting orientation: any

Internal volume: ≤4.7 cm3

Weight: 80 … 159 g

Maintainance: none

Brochure

Datasheet

Manual