INFICON Spot CDS530D 静電容量ダイヤフラムゲージ

Full scale (FS): 10 Torr - 1000 Torr 

Accuracy (Sensor 1 & 2): 0.5 % of reading

Temperature effect

on zero: 0.01 % FS / °C

on span: 0.01 % of reading / °C

Resolution: 0.01 % FS / °C

Long time stability: 0.5 % FS / year

Lowest reading: 0.05 % FS

Measuring range: 0.1 ... 100 % FS

Temperature

Ambient operating: 0 ... 60 °C

Compensated range: 10 ... 50 °C

Storage: -20 ... 80 °C

Ambient humiditiy limits: < 80 % RH non-condensing

Maximum admissible pressure: 400 kPa absolute

Burst pressure: 800 kPa absolute

Supply voltage: 5 ± 0.25 VDC

Supply voltage ripple: ≤ 50 mVpp

Power consumption: < 0.05 W operation

Digital interface: SPI bus

Data rate: 1, 2.5, 5, 10, 25, 100, 200, 250 ms (selectable during ordering process)

Responds time: 2 ms (10 ... 90%)

Electrical connection: JST or Flex. cable

Materials exposed to vacuum: ceramics (Al2O3), stainless steel (AISI 316L)

Tightness, leak rate: < 1 E-9 mbar l/s

Mounting position: any, recommended vertical up

Datasheet

Manual