INSIZE SPM-2000 粗さおよびプロフィール測定機（2プローブ型） (0.05~0.25mm/s, 140mmx50mm)

X axis measuring range: 140mm

X axis resolution: 0.2µm

X axis traverse speed: 0.05~15mm/s

Z axis measuring range: 50mm

Z axis resolution: 0.05μm

Z axis traverse speed: 0.2~15mm/s

Straightness: 0.5µm/100mm

Linear accuracy: ±(0.8+|0.15Η|)µm, H is measuring height in mm

Angular measuring accuracy: ±1'

Arc measuring accuracy: ±(1.5+R/12)µm, R is 2~10mm standard ball

Measuring unit: μm/μin

Measuring speed: 0.05~1mm/s

Traceable angle: 72° (upward), 88° (downward)

Travel of Z axis: 430mm

Power supply: 220±5%V, 50Hz

Dimension (L×W×H): 1400×850×1780mm

Weight: 350kg

ROUGHNESS MEASUREMENT SPECIFICATION

Roughness parameters: Ra, Rp, Rv, Rz, Rz(JIS), R3z, Rz(DIN), Rzj, Rmax, Rc, Rt, Rq, Rsk, Rku, Rsm, Rs, PAq, Rk, Rpk, Rvk, Mr1, Mr2, Rmr

Waviness parameters: Wa, Wt, Wp, Wv, Wz, Wq, Wsm, Wsk, Wku, Wmr

Original profile parameters: Pa, Pt, Pp, Pv, Pz, Pq, Psm, Psk, Pku, Pmr

Measuring range: +420µm

Resolution: 0.001μm

Linear accuracy: ≤±(5nm+2.8%)

Probe radius/angle: 5μm/90°

Cut off: 0.025/0.08/0.25/0.8/2.5/8mm

Number of cut-offs: 2~7

Measuring unit: μm

Measuring speed: 0.05~0.25mm/s

Datasheet