KEITHLEY 2602B SourceMeter 半導体部品検査機 (40V, 10A, 2 Channels,200W)

Voltage Source Specifications
Range;Programming;Accuracy (1 Year);Typical Noise (peak-peak)
      Resolution  ±(% rdg. + volts)  0.1Hz–10Hz
100 mV 5 µV   0.02% + 250 µV  20 µV
1 V    50 µV  0.02% + 400 µV  50 µV
6 V    50 µV  0.02% + 1.8 mV  100 µV
40 V   500 µV 0.02% + 12 mV   500 µV
Current Source Specifications
Range;Programming;Accuracy (1 Year);Typical Noise (peak-peak)
      Resolution  ±(% rdg. + volts)  0.1Hz–10Hz
100 nA  2 pA    0.06% + 100 pA   5 pA
1 µA    20 pA   0.03% + 800 pA   25 pA
10 µA   200 pA  0.03% + 5 nA     60 pA
100 µA  2 nA    0.03% + 60 nA    3 nA
1 mA    20 nA   0.03% + 300 nA   6 nA
10 mA   200 nA  0.03% + 6 µA     200 nA
100 mA  2 µA    0.03% + 30 µA    600 nA
1 A     20 µA   0.05% + 1.8 mA   70 µA
3 A     20 µA   0.06% + 4 mA     150 µA
10 A    200 µA  0.5% + 40 mA (typical)
Additional Source Specifications
Transient Response Time <70 s="" for="" the="" output="" to="" recover="" to="" within="" 0="" 1="" for="" a="" 10="" to="" 90="" step="" change="" in="" load="" br=""> Voltage Source Output Settling Time
Time required to reach within 0.1% of final value after source level command is processed on a fixed range.
100 mV, 1 V Ranges <50 s="" typical="" br=""> 6 V Range <100 s="" typical="" br=""> 40 V Range 1 <150 s="" typical="" br=""> Current Source Output Settling Time
Time required to reach within 0.1% of final value after source level command is processed on a fixed range.
Values below for Iout × Rload = 1 V unless noted.
3 A Range <80 s="" typical="" current="" less="" than="" 2="" 5="" a="" rload="">2 Ω).
1 A–10 mA Ranges <80 s="" typical="" rload="">6 Ω).
1 mA Range <100 s="" typical="" br=""> 100 µA Range <150 s="" typical="" br=""> 10 µA Range <500 s="" typical="" br=""> 1 µA Range <2.5 ms="" typical="" br=""> 100 nA Range <25 ms="" typical="" br=""> With handle and bumpers: 89 mm × 213 mm × 460 mm
With bumpers and handle: 5.5 kg 
 

Datasheet

Manual