MKS 142A 加熱絶対圧力スイッチ (1Torr; 100°C; Standard DPDT)

Full Scale Range: 1 Torr

Set Point Range: 0.002 - 1 Torr

Sensor Temperature: 100°C

Fitting Type: 0.5 in. OD tube

Accuracy: ±0.5% of range (± temperature coefficients)

Zero Temperature Coefficient: ±0.015% of Full Scale/°C

Span Temperature Coefficient: ±0.03% of set point/°C

Operating Temperature Range: 20 - 70°C

Response Time: <20 msec from 0 to Full Scale

Relay Mode: Energizes above set point

Relay Contact Ratings: DPDT, 2 amps @ 30 VDC or 1 amp @ 120 VAC resistive

Exposed Materials: Inconel and 316 S.S.

Internal Volume: 7.0 cc

Overpressure: 120% of Full Scale or 35 psia (1000 mmHg), whichever is larger

Power Requirements: 20 - 30 VDC, 1.2 A

For specific range please check the attachment below!

Literature

Drawing