MKS 1579A 汎用、エラストマー封入マスフローコントローラ (50 - 300 slm)

Control Range: 2 to 100% of Full Scale

Full Scale Flow Range : 50, 100, 200, 300 slm (N2 in slm)

Fitting Type: Standard: 8 VCR® male

Analog I/O Connector: 15-pin Type "D" male

Seal Material: Buna-N, Neoprene®, Kalrez®

Maximum Inlet Pressure: 100 psig

Normal Operating Pressure Differential: 15 to 60 psid (50, 100 slm)

                                                                25 to 60 psid (200 slm)

                                                                40 to 60 psid (300 slm)

Typical Accuracy: Standard: ±1% of Full Scale

Repeatability: ± 0.2% of Full Scale

Resolution: 16 Bit

Zero Temperature Coefficient: <0.05% of Full Scale /°C

Span Temperature Coefficient: <0.10% of Full Scale /°C

Pressure Coefficient: ± 0.02% of Reading/psi

Warm-up Time: 30 minutes

Typical Settling Time: <1 sec

Operating Temperature: 15° to 40°C

Power Requirements: 20.5 to 30 VDC, 300 mA

Compliance: CE

For specific range please check the attachment below!

Literature

Manual

Drawing