MKS 1640A 圧力式マスフローコントローラー (2-20 sccm)

Full Scale Flow Range: 2-20 sccm (SDS materials)

                                     10-1000 sccm (other materials)

                                     (N2 equivalent)

Maximum Inlet Pressure: 5 psig

Control Range: 5% to 100% of Full Scale

Typical Accuracy: Gas/flow rate dependent

Repeatability: ± 0.2% of Full Scale

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: <0.02% of Full Scale/°C

Span Temperature Coefficient: <0.2% of Rdg./°C

Warm-up Time: 30 minutes

Typical Settling Time: <5 sec

Operating Temperature: 0° to 50°C

Power Requirements: ± 15 VDC (± 5%) @ 200 mA

Flow Input Output Signal: 0 to 5 VDC into >10K Ω

Wetted Materials: 316L S.S., nickel, Inconel®

Fitting Type: Swagelok® 4 VCR®

Compliance: CE

For specific range please check the attachment below!

Literature

Manual

Drawing