MKS 220DD 加熱差動容量マノメーター (1 Torr; 0.5 in. OD tube)

Sensor Type: Industrial Capacitance Manometer

Measurement Type: Differential

Full Scale Range: 1 Torr

Sensor Temperature: 45°C

Fitting Type: 0.5 in. OD tube

Accuracy: ±0.15% of Reading (± temperature coefficients)

Resolution: 0.01% of Full Scale

Analog Output: 0 - 10 VDC and 4 - 20 mA

Electrical Connector: 6-pin Circular

Zero Temperature Coefficient: 0.008% of Full Scale/°C

Span Temperature Coefficient: 0.02% of Reading/°C

Operating Temperature Range: 5 - 40°C

Exposed Materials: Px side: Inconel

                               Pr side: Inconel, Ceramic, Palladium, Stainless Steel, Glass

Volume: Px side: 7.0 cc

              Pr side:19.0 cc

Overpressure Limit: 140 kPa

Power Requirements: 115/230 VAC

For specific range please check the attachment below!

Literature

Manual

Drawing