MKS 226B 差動静電容量マノメーター (10 Torr; 4 VCR-F)

Measurement Type: Differential

Full Scale Range: 10 Torr

Analog Output: 0-5 VDC

Calibration: Unidirectional

Electrical Connector: 9-pin D-sub

Resolution: 0.01% of Full Scale

Accuracy: 0.50% of Full Scale

Zero Temperature Coefficient: 0.1% Full Scale/°C for standard accuracy specification

Span Temperature Coefficient: 0.04% of Reading/°C

Sensor Internal Volume: Measurement Side: 1.4 cm3

                                       Reference Side: 9.0 cm3

Operating Temperature Range: 0-50°C

Maximum Overpressure: Measurement Side: 120% of Full Scale or 20 psi (140 kPa), whichever is higher

                                        Reference Side: 120% of Full Scale

Maximum Line Pressure: 40 psig (275 kPa)

Exposed Materials: Measurement Side: Inconel

                               Reference Side: Inconel, ceramic, palladium, stainless steel, glass

Measurement Side Fitting: 4 VCR female

Reference Side Fitting: 4 VCR female

Mounting Bracket: Standard

Trip Points: 1

Power Requirements: 24 VDC

Compliance: CE, SEMI S2-0706

For specific range please check the attachment below!

Literature

Manual

Drawing