MKS 622D 非加熱絶対静電容量マノメーター (100 Torr; NW16 ISO-KF)

Measurement Type: Absolute

Full Scale Range: 100 Torr

Sensor Temperature: Ambient

Fitting Type: NW16 ISO-KF

Analog Output: 0-10 VDC

Accuracy: 0.25% of Reading

Electrical Connector: Terminal block

Zero Temperature Coefficient: 0.005% Full Scale/°C

Span Temperature Coefficient: 0.04% of Reading/°C

Operating Temperature Range: 0-50°C

Resolution: 0.001% of Full Scale

Volume: 6.3 cc

Overpressure Limit: 45 psia (310 kPa)

Exposed Materials: Inconel® and Incoloy® nickel alloys

Power Requirements: ±15VDC (±5%) @ 35 mA

Compliance: CE

For specific range please check the attachment below!

Literature

Manual

Drawing