MKS 640B 統合された絶対圧力コントローラー (10 Torr; 200 sccm; Viton Valve Plug)

Physical:

- Type: 640B Absolute Pressure Controller

- Pressure Range: 10 Torr

- Pressure Resolution: <100 msec

- Transducer Over Pressure Limit: 45 psia or 2x Full Scale, whichever is greater

- Flow Rate: 200 sccm

Performance:

- Pressure Control:

  + Range: >2 to 100% of Full Scale

  + Accuracy: ±0.2% of Full Scale

  + Time Response: <1.0 sec (excluding system time constant)

Electrical:

- Power Required: ±15 VDC ±5%, 200 mA maximum

- Input-Output Signals: 0-5 VDC standard; 0-10 VDC optional

- Connector: 15-pin male type “D”

- Cable Length: 100 ft. (30 m) max.

- Trip Points: Two open-collector transistors

                     Rated: 250 mA @ 30 VDC

                     Adjustable: 1 to 100% of Full Scale

                    Hysteresis: 3% of Full Scale

                    Indicators: Green LED's on when actuated

- Compliance: CE

Mechanical:

- Fitting Type: 4 VCR male

- Valve Seat: Metal

- Plug Material: Viton

- Dimensions: 1.5 x 4.88 x 5.5 in. (38.1 x 124 x 140 mm)

- Weight: 2.54 lbs. (1.15 kg)

Environmental

- Operating Temperature: 0° to 50°C (32° to 122°F)

- Storage Temperature: -20° to 80°C (-4° to 176°F)

Literature

Manual