MKS 728A 加熱された絶対静電容量マノメーター (10Torr; 8 VCR-F; 9-pin D-sub)

Sensor Type: Capacitance Manometer

Measurement Type: Absolute

Full Scale Range: 10 Torr

Sensor Temperature: 100°C

Fitting Type: 8 VCR female

Analog Output: 0 - 10 VDC

Electrical Connector: 9-pin D-sub

Accuracy: 0.50% of Reading

Response Time: <75 msec

Zero Temperature Coefficient: 0.010% of Full Scale/°C

Span Temperature Coefficient: 0.040% of Full Scale/°C

Operating Temperature Range: 15 - 50°C

Overpressure Limit: 45 psia or 2 x Full Scale range, whichever is greater

Burst Pressure: 10 x Full Scale range or 90 psi, whichever is greater

Exposed Materials: Inconel®

Power Requirements: ± 15 VDC

For specific range please check the attachment below!

Literature

Manual

Drawing