MKS 905 MicroPirani™ 真空圧力センサーキット (Nude Sensor)

Digital Communication: Serial UART, TTL level

Measurement Range: 1 x 10^-5 to 760 Torr

                                    1 x 10^-5 to 1000 mbar

                                    1 x 10^-3 to 1 × 10+5 Pascal

Operating Temperature: 5° to 40°C (41° to 104°F)

Maximum Bakeout Temperature: 130°C (266°F)

Storage Temperature: -10° to 55°C (14° to 131°F)

Analog Output: 0.5 VDC - 4.5 VDC

Power Requirements: +5 VDC (±2%), 45 mA

MicroPirani Accuracy: 5% (typical measuring accuracy from 1E-3 to 100 Torr Nitrogen pressure measured at 25°C)

Exposed Materials: Silicon, SiO2, SiN4, Epoxy, Gold

Weight: 9 grams (Electronics Module)

Set Point Configuration: 3 open collector outputs, 50 mA sink current

Units: Torr, mbar, Pascal

Literature

Manual