MKS 925 Micro Pirani™ 真空圧力変換器 (NW16 ISO-KF; RS232; DB15; 3 Relays)

Absolute Measurement Range: 1.0 x 10-5 to 760 Torr

Digital Communication: RS232

Type: Vacuum Transducer

Sensor: MicroPirani (MEMS Thermal Conductivity)

Display: No

Seal Material: Viton

Electrical Connector: 15-pin, High Density, D-sub male

Interface: RS232/analog

Relays: 3

Fitting Type: NW16 ISO-KF

Installation Orientation: Any

Set Point Range: Absolute: 5.0 x 10-4 - 500 Torr

Calibration Gas: Air, Argon, Helium, Nitrogen, Hydrogen, H2O vapor, CO2, Xenon, Neon

Operating Temperature: 0 - 40°C (32 - 104°F)

Maximum Bakeout Temperature: 85°C (185°F)

Analog Output: 1-9 VDC (1 VDC per Decade)

Analog Output Resolution: 16 bit

Relay Contact Rating: 1 Amp @ 30 VAC/DC, resistive

Relay Response: <100 msec maximum

Power Requirements: 9 - 30 VDC, <1.5 Watts maximum

Accuracy: 5 x 10-4 to 10-3 Torr ±10% of Reading, 10-3 - 100 Torr ±5% of Reading, 100 Torr to Atmosphere ±25% of Reading (typical)

Repeatability: 10-3 to 100 Torr ±2% of Reading (typical)

Overpressure Limit: 3000 Torr (absolute)

Exposed Materials: 304 stainless steel, Silicon, SiO2, Si3N4, Gold, Viton, Low out gassing epoxy resin

Electronic Casing and Flange: 304 stainless steel

Compliance: CE

Digital Baud Rates: 4800 - 230400 Baud

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