MKS 974B 冷陰極 - MicroPirani-ピエゾ式真空圧力変換器 (Touch-screen; 3 relays; RS232)

Absolute Measurement Range: 1.0 x 10-8 to 1500 Torr

Differential Measurement Range: -760 to +760 Torr

Digital Communication: RS232

Type: Vacuum Transducer

Sensor: Cold Cathode,MicroPirani (MEMS Thermal Conductivity) and Piezo Differential (MEMS Diaphragm)

Display: Touch-screen

Seal Material: Viton

Electrical Connector: 15-pin, High Density, D-sub male

Interface: RS232/analog

Relays: 3

Fitting Type: NW25 ISO-KF

Installation Orientation: Any

Set Point Range: Absolute: 1 x 10-8 Torr to 1000 Torr, Differential: -760 to +100 Torr

Calibration Gas: Nitrogen

Operating Temperature: 0 - 40°C (32 - 104°F)

Maximum Bakeout Temperature: 85°C (185°F)

Overpressure Limit: 1500 Torr

Internal Volume: 21 cm3

Electronic Casing and Flange: 304 stainless steel

Compliance: CE

Zero Stability: ±0.1% of Full Scale (Full Scale = 760 Torr) (typical)

Literature

Manual

Drawing