MKS AA09A 汎用絶対静電容量マノメーター (1 - 25000 Torr)

Specifications

Full Scale Range: 1, 2, 10, 100, 1000, 5000, 10000, 15000, 20000, and 25000 Torr (mmHg)

Resolution: 0.01% of Full Scale

Accuracy: 0.5% of Reading (± temperature coefficients)

Temperature Coefficients:

Zero: 0.02% Full Scale/°C

Span: 0.04% of Reading

Ambient Operating Temperature:

Sensor: 0° to 150°C (bakeable to 200°C with cable removed)

PreAmp: 0° to 50°C

Overpressure Limit: 120% of sensor F.S. or 35 psia whichever is greater

Materials Exposed to Gases: Inconel and 316 SST

Volume: 7.0 cc

Input Power Required: ±15 VDC @ 35mA regulated to ±5%

Output: 0 to 10 VDC into >10k

Electrical Connector: 14-pin micro

Fittings: 0.50 inch (12.7 mm) O.D. tube (standard), 8 female VCR®, 1.33 inch (33.8 mm) Conflat®, and NW16-KF

Compliance: CE

For specific range please check the attachment below!

Literature

Drawing

Manual