MKS AX8575 SEMOZON®マルチチャンネルオゾンデリバリーシステム (350g/Nm3)

Type: Ozone Gas Delivery System

Ozone Output: 350g/Nm3

Flow Rate: 40 slm

Feed Gas: Oxygen, Nitrogen (20 - 100 ppm of total flow)

Feed Gas Supply Pressure: 50 psig (3.5 kg/cm2) nominal, 60 psig (4.2 kg/cm2) maximum, N2 pressure 10 psi higher than O2 pressure

Feed Gas Purity: 99.9995% minimum

Operating Temperature: 41 - 104°F (5 - 40°C)

Cooling Water Temperature Required: 12 - 21°C with chiller, 5 - 17°C without chiller

Voltage Requirements: 208 volts AC (±10%), three phase

Current Requirements: 31 Amps RMS, 50 Amps service (depending on configuration) minimum of 10,000 A.I.C, 60 Amps service with chiller

Frequency: 50/60 Hz

Exhaust Flow Rate: 150 cfm (70.8 l/s)

Control Air Pressure: 70 - 100 psig

Dimensions: 24 x 75 x 36 in. (610 mm x 1575 mm x 914 mm) (width x height x depth)

Relative Humidity: 30 - 90% (non - condensing)

Weight: 600 lbs.(272 kg) for system with one generator

             880 lbs.(400 kg) for system with four generators

             1100 lbs. (499 kg) for system with two generators and internal chiller

Compliance: CE, S2 - 0302, F47

Altitude: Up to 3280 feet (1000 m) above mean sea level

Literature

Drawing

Application note